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Published in 2021 at "Silicon"
DOI: 10.1007/s12633-021-01159-4
Abstract: 2D global transient numerical model based on a new large-size ALD-G7 (G7) crystalline silicon ingot furnace is established and experimentally verified. A new pyramid-shaped bottom grille structure is designed. The temperature field, flow field, crystal…
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Keywords:
crystal growth;
grille;
large size;
bottom grille ... See more keywords