Dielectric breakdown of alumina thin films produced by pulsed direct current magnetron sputtering
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DOI: 10.1016/j.tsf.2018.07.004
Abstract: Abstract Alumina films (~2 μm thick) were deposited with a mixed Cu/Al interlayer onto copper. Direct current (DC)/Pulsed DC (PDC) magnetron sputtering techniques were independently compared for reactive alumina sputtering. In DC sputtered films, elemental aluminium… read more here.
Keywords: magnetron sputtering; alumina; breakdown alumina; dielectric breakdown ... See more keywords