Direct current magnetron coating chamber characterization directed toward the efficient development of broadband x-ray optic multilayer coatings
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DOI: 10.1117/1.jatis.6.1.015004
Abstract: Abstract. A direct current (DC) magnetron sputtering system has been developed at NASA Marshall Space Flight Center for depositing broadband x-ray optic multilayer coatings. The system has the capability to house up to four, 2-in.-diameter… read more here.
Keywords: broadband ray; current magnetron; multilayer coatings; magnetron ... See more keywords