Efficient thermal utilization in MEMS bulk micromachined pyroelectric infrared sensor using thermal oxide thin layer
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-017-3560-0
Abstract: Pyroelectric infrared sensors utilize interfacial polymer bonding, thick porous silica layer and Si3N4 thin film as conventional methods of reducing heat sinking with substrate. The thick polymer and porous silica layers cause additional enhancement in… read more here.
Keywords: infrared sensor; pyroelectric infrared; layer; bulk micromachined ... See more keywords
Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes
Sign Up to like & getrecommendations! Published in 2022 at "Nanomaterials"
DOI: 10.3390/nano12122066
Abstract: Due to the unique combination of physicochemical and structural properties of carbyne-enriched nanocoatings, they can be used for the development of high-end electronic devices. We propose using it for the development of sensor platforms based… read more here.
Keywords: bulk micromachined; deposition; enriched nanocoating; volatile organic ... See more keywords