Kilovolt-class β-Ga2O3 MOSFETs on 1-in. bulk substrates
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DOI: 10.1063/5.0187989
Abstract: We report on the demonstration of β-Ga2O3 MOSFETs fabricated on 1-in. bulk substrates using metalorganic vapor phase epitaxy (MOVPE) with disilane (Si2H6) as the silicon precursor. Sheet charge uniformity of the as-grown films was measured… read more here.
Keywords: kilovolt class; bulk substrates; ga2o3 mosfets; mosfets bulk ... See more keywords
Structural and optical properties of epitaxial ScxAl1−xN coherently grown on GaN bulk substrates by sputtering method
Sign Up to like & getrecommendations! Published in 2024 at "Applied Physics Letters"
DOI: 10.1063/5.0213662
Abstract: Three scandium aluminum nitride (ScAlN) thin films with different Sc compositions of 6%, 10%, and 14% were heteroepitaxially grown on n-type GaN bulk substrates by a low-temperature sputtering method. Atomically flat and smooth surfaces were… read more here.
Keywords: bulk substrates; grown gan; coherently grown; scaln ... See more keywords