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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13091476
Abstract: As the physical dimensions of cell transistors in dynamic random-access memory (DRAM) have been aggressively scaled down, buried-channel-array transistors (BCATs) have been adopted in industry to suppress short channel effects and to achieve a better…
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Keywords:
structural variations;
bcat;
buried channel;
channel array ... See more keywords