Evaluating effectiveness of dust by-product treatment with scrubbers to mitigate explosion risk in ZrO2 atomic layer deposition process.
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DOI: 10.1016/j.jhazmat.2020.123284
Abstract: In processes of manufacturing semiconductors, reactive by-products (as a form of fine powder, i.e., dust) are deposited in pipes installed on post processing and exhaust systems, potentially involving a considerable explosion risk. In this study,… read more here.
Keywords: treatment; product; wet scrubber; explosion ... See more keywords