Focused Electron Beam Induced Deposition (FEBID) and Post-Growth Purification Using the Heteroleptic Ru Complex (η3-C3H5)Ru(CO)3Br.
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DOI: 10.1021/acsami.9b07634
Abstract: Focused electron beam induced deposition using the heteroleptic complex (η3-C3H5)Ru(CO)3Br as a precursor resulted in deposition of material with Ru content of 23 at%. TEM images indicated a nanogranular structure of pure Ru nanocrystals, embedded… read more here.
Keywords: deposition; electron beam; focused electron; c3h5 3br ... See more keywords