A new high precision, broad range gas micro-flow calibration apparatus
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DOI: 10.1016/j.vacuum.2019.02.037
Abstract: Abstract In this paper, a new calibration apparatus has been developed for gas micro-flow calibration. The apparatus employs both the constant volume method and the constant conductance method. The calibration range from 10−1 to 10−13 Pa·m3/s,… read more here.
Keywords: calibration; gas micro; conductance; calibration apparatus ... See more keywords