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Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-016-2915-2
Abstract: This paper presents design and characterization of a novel thermal-calorimetric flow-meter using suspended-cantilever-structure. There is an air gap between the heater and each individual thermistor providing a good thermal isolation. Due to the suspended-structure which…
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Keywords:
flow meter;
gas flow;
calorimetric gas;
meter ... See more keywords