Cantilever with High Aspect Ratio Nanopillars on Its Top Surface for Moisture Detection in Electronic Products
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DOI: 10.1002/adem.201700203
Abstract: This work reports the patterning silicon pillars by metal-assisted chemical etching (MACE) process as a post process on a silicon cantilever for a moisture detection. Although the cantilever is very fragile, the patterning of the… read more here.
Keywords: aspect ratio; moisture; moisture detection; cantilever high ... See more keywords