Design and Fabrication of a Novel MEMS Relay with Low Actuation Voltage
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DOI: 10.3390/mi11020171
Abstract: Compared with conventional solid-state relays, micro-electro mechanical system (MEMS) relays have the advantages of high isolation, low contact resistance, low power consumption, and abrupt switching characteristics. Nevertheless, the widespread application of MEMS relays has been… read more here.
Keywords: low actuation; mems relay; cantilever mems; actuation voltage ... See more keywords