A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors
Sign Up to like & getrecommendations! Published in 2018 at "Nano-Micro Letters"
DOI: 10.1007/s40820-018-0189-1
Abstract: In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared… read more here.
Keywords: surface stress; cantilever; stress based; cantilever sensors ... See more keywords