Comparing AFM cantilever stiffness measured using the thermal vibration and the improved thermal vibration methods with that of an SI traceable method based on MEMS
Sign Up to like & getrecommendations! Published in 2017 at "Measurement Science and Technology"
DOI: 10.1088/1361-6501/28/3/034010
Abstract: PTB has developed a new contact based method for the traceable calibration of the normal stiffness of AFM cantilevers in the range from 0.03 N m(-1) to 300 N m-1 to the SI units based… read more here.
Keywords: improved thermal; vibration; stiffness measured; thermal vibration ... See more keywords