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Published in 2020 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2019.2950104
Abstract: This paper presents a balanced-bridge method for the characterization of dielectric charging effect in RF MEMS (radio frequency micro-electromechanical system) cantilever switches. The method measures the relative change of up-state capacitance caused by dielectric charging.…
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Keywords:
dielectric charging;
balanced bridge;
method characterization;
cantilever switches ... See more keywords