Application of Solution Method to Prepare High Performance Multicomponent Oxide Thin Films
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DOI: 10.3390/membranes12070641
Abstract: Capacitors play an increasingly important role in hybrid integrated circuits, while the MIM capacitors with high capacitance density and small thickness can meet the needs of high integration. Generally speaking, the films prepared with a… read more here.
Keywords: capacitance density; multi component; solution method; metal ... See more keywords