High density supercapacitors with atomic layer deposited SiO2 dielectric as solid state electrolyte
Sign Up to like & getrecommendations! Published in 2025 at "Journal of Applied Physics"
DOI: 10.1063/5.0264293
Abstract: For on-chip supercapacitors used for energy storage, it is required that the capacitance density is supposed to be large enough to enhance the energy storage capacity and the electrolytes can be easily filled in high… read more here.
Keywords: atomic layer; density; solid state; capacitance ... See more keywords
High Capacitance Density and Thermal Stability in Strontium
Sign Up to like & getrecommendations! Published in 2025 at "Materials"
DOI: 10.3390/ma18081687
Abstract: Magnetron sputtering allows for the accurate estimation of film thickness. Strontium titanate (STO) thin films were deposited on Nb-doped STO substrates using radiofrequency magnetron sputtering technology. The microstructures and dielectric properties of STO thin films… read more here.
Keywords: capacitance; sto thin; capacitance density; strontium ... See more keywords
Application of Solution Method to Prepare High Performance Multicomponent Oxide Thin Films
Sign Up to like & getrecommendations! Published in 2022 at "Membranes"
DOI: 10.3390/membranes12070641
Abstract: Capacitors play an increasingly important role in hybrid integrated circuits, while the MIM capacitors with high capacitance density and small thickness can meet the needs of high integration. Generally speaking, the films prepared with a… read more here.
Keywords: capacitance density; multi component; solution method; metal ... See more keywords