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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13050646
Abstract: In this paper, a novel high isolation and high-capacitance-ratio radio-frequency micro-electromechanical systems (RF MEMS) switch working at Ka-band is designed, fabricated, measured and analyzed. The proposed RF MEMS switch mainly consists of a MEMS metallic…
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Keywords:
mems switch;
high capacitance;
capacitance ratio;
isolation ... See more keywords