Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers
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DOI: 10.3390/mi9030120
Abstract: In this paper, two versions of capacitive accelerometers based on low-temperature co-fired ceramic (LTCC) technology are developed, different with respect to the detection technique, as well as the mechanical structure. Fabrication of the key structure,… read more here.
Keywords: design fabrication; ltcc; capacitive accelerometers; fabrication performance ... See more keywords