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   Articles with "capacitive mems" as a keyword



Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization

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recommendations! Published in 2020 at "Microsystem Technologies"

DOI: 10.1007/s00542-020-04755-3

Abstract: In this communication, we have designed, simulated, performance improved, fabricated and characterized a shunt capacitive RF MEMS switch with perforated serpentine membrane (Au). Fabrication is done using surface micromachining with four masks. AlN dielectric material… read more here.

Keywords: serpentine membrane; shunt capacitive; capacitive mems; perforated serpentine ... See more keywords

Design and fabrication of a low insertion loss capacitive RF MEMS switch with novel micro-structures for actuation

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recommendations! Published in 2017 at "Solid-state Electronics"

DOI: 10.1016/j.sse.2016.10.004

Abstract: Abstract In this paper, we have developed an electrostatic driven capacitive RF MEMS switch. The actuation voltage is applied to the actuation electrodes, and the DC voltage is isolated from the signal line and RF… read more here.

Keywords: voltage; capacitive mems; mems switch; insertion loss ... See more keywords

Linearity and RF Power Handling on Capacitive RF MEMS Switches

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recommendations! Published in 2019 at "IEEE Transactions on Microwave Theory and Techniques"

DOI: 10.1109/tmtt.2019.2945273

Abstract: Linearity characteristics of capacitive tuners under large radio frequency (RF) power have become an important issue for today’s cellphone industry. The use of these devices as antenna tuners has become critically important due to the… read more here.

Keywords: linearity power; mems switches; frequency; power ... See more keywords

Analysis of Key Factors Affecting the Sensitivity of Dual-Backplate Capacitive MEMS Microphones

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recommendations! Published in 2025 at "Micromachines"

DOI: 10.3390/mi16101154

Abstract: This paper presents a comprehensive investigation of sensitivity-determining factors in dual-backplate capacitive MEMS microphones through analytical modeling, finite element analysis (FEM), and experimental validation. The study focuses on three critical design parameters: backplate perforation density,… read more here.

Keywords: mems microphones; backplate capacitive; dual backplate; backplate ... See more keywords