Circular membrane approximation model with the effect of the finiteness of the electrode’s diameter of MEMS capacitive micromachined ultrasonic transducers
Sign Up to like & getrecommendations! Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-016-3184-9
Abstract: In this paper, an analytical model for evaluation of membrane displacement, multiple resonances, mechanical impedances and bandwidth profile of capacitive micromachined ultrasonic transducers (CMUTs) developed by MEMS technology for medical imaging is presented. Improvement in… read more here.
Keywords: finiteness; model; membrane; micromachined ultrasonic ... See more keywords
Design and Fabrication of a High-Power Air-Coupled Capacitive Micromachined Ultrasonic Transducer Array With Concentric Annular Cells
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2017.2746006
Abstract: One shortcoming of capacitive micromachined ultrasonic transducers (CMUTs) for commercial use is the weak output power relative to traditional ultrasonic transducers. Recently, we reported an annular CMUT cell with an improved transmit efficiency over a… read more here.
Keywords: array; power; air; concentric annular ... See more keywords
A Handheld Imaging Probe for Acoustic Angiography With an Ultrawideband Capacitive Micromachined Ultrasonic Transducer (CMUT) Array
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2022.3172566
Abstract: This article presents an imaging probe with a 256-element ultrawideband (UWB) 1-D capacitive micromachined ultrasonic transducer (CMUT) array designed for acoustic angiography (AA). This array was fabricated on a borosilicate glass wafer with a reduced… read more here.
Keywords: capacitive micromachined; imaging probe; micromachined ultrasonic; cmut ... See more keywords
Pre-Charged Collapse-Mode Capacitive Micromachined Ultrasonic Transducer (CMUT) Receivers for Efficient Power Transfer
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control"
DOI: 10.1109/tuffc.2024.3523179
Abstract: Capacitive micromachined ultrasonic transducers (CMUTs) offer several advantages over standard lead zirconate titanate (PZT) transducers, particularly for implantable devices. To eliminate their typical need for an external bias voltage, we embedded a charge storage layer… read more here.
Keywords: layer; capacitive micromachined; power transfer; power ... See more keywords
PMMA-Based Wafer-Bonded Capacitive Micromachined Ultrasonic Transducer for Underwater Applications
Sign Up to like & getrecommendations! Published in 2019 at "Micromachines"
DOI: 10.3390/mi10050319
Abstract: This article presents a new wafer-bonding fabrication technique for Capacitive Micromachined Ultrasonic Transducers (CMUTs) using polymethyl methacrylate (PMMA). The PMMA-based single-mask and single-dry-etch step-bonding device is much simpler, and reduces process steps and cost as… read more here.
Keywords: pmma based; based wafer; underwater applications; micromachined ultrasonic ... See more keywords
A Study on Capacitive Micromachined Ultrasonic Transducer Periodic Sparse Array
Sign Up to like & getrecommendations! Published in 2021 at "Micromachines"
DOI: 10.3390/mi12060684
Abstract: Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). CMUT elements are easily made into a high-density array, which will increase the hardware complexity. In order to reduce the… read more here.
Keywords: array; sparse array; micromachined ultrasonic; ultrasonic transducer ... See more keywords
Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding
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DOI: 10.3390/mi13010099
Abstract: Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further development and application. In this… read more here.
Keywords: transducer; capacitive micromachined; silicon; cmut array ... See more keywords
Particle Manipulation in 2D Space Using a Capacitive Micromachined Ultrasonic Transducer
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DOI: 10.3390/mi13040534
Abstract: Ultrasonic particle manipulation is a noncontact method for controlling microscale objects, such as cells or microparticles, using an acoustic field. In this study, a 2D array of capacitive micromachined ultrasonic transducers (CMUTs), placed horizontally in… read more here.
Keywords: oil; surface; capacitive micromachined; micromachined ultrasonic ... See more keywords
Design and Fabrication of Multi-Frequency and Low-Quality-Factor Capacitive Micromachined Ultrasonic Transducers
Sign Up to like & getrecommendations! Published in 2025 at "Micromachines"
DOI: 10.3390/mi16070797
Abstract: Capacitive micromachined ultrasonic transducers (CMUTs) have been developed for air-coupled applications to address key challenges such as noise, prolonged ringing, and side-lobe interference. This study introduces an optimized CMUT design that leverages the squeeze-film damping… read more here.
Keywords: micromachined ultrasonic; ultrasonic transducers; quality factor; capacitive micromachined ... See more keywords