MEMS Capacitive Microphones: Acoustical, Electrical, and Hidden Thermal-Related Issues
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2018.2837143
Abstract: This paper reports on the design and implementation of high performance MEMS microphones. The main parameters defining microphone performance, i.e., sensitivity, acoustic overload level, and signal-to-noise ratio, have been extracted from an acoustical–mechanical–electrical model of… read more here.
Keywords: microphones acoustical; electrical hidden; capacitive microphones; hidden thermal ... See more keywords
A Review of MEMS Capacitive Microphones
Sign Up to like & getrecommendations! Published in 2020 at "Micromachines"
DOI: 10.3390/mi11050484
Abstract: This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These… read more here.
Keywords: capacitive microphones; review mems; mems capacitive;