Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode
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DOI: 10.3390/mi8100312
Abstract: This paper reports the design and fabrication of capacitive silicon nanomechanical resonators with the selective vibration of a high-order mode. Fixed-fixed beam capacitive silicon resonators have been successfully produced by the use of electron beam… read more here.
Keywords: silicon; vibration; order mode; capacitive silicon ... See more keywords