Electrical properties of nanostructured SiN films for MEMS capacitive switches
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/0960-1317/27/1/014001
Abstract: The electrical properties of gold nanorods nanostructured silicon nitride films are comprehensively investigated with the aid of metal–insulator–metal capacitors and RF MEMS capacitive switches. Different nanorod diameters and densities were grown on the bottom electrode… read more here.
Keywords: sin films; properties nanostructured; mems capacitive; capacitive switches ... See more keywords
On the Discharge Transport Mechanisms Through the Dielectric Film in MEMS Capacitive Switches
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2019.2962068
Abstract: A method that allows the investigation of discharge transport mechanism in dielectric films used in MEMS capacitive switches or MIM capacitors or even bare dielectric films is presented. The method is based on monitoring the… read more here.
Keywords: mems capacitive; dielectric film; capacitive switches; film ... See more keywords