MIM capacitors as simple test vehicles for the DC/AC characterization of ALD-Al2O3 with auto-correction of parasitic inductance
Sign Up to like & getrecommendations! Published in 2020 at "Microelectronics Reliability"
DOI: 10.1016/j.microrel.2019.113516
Abstract: Abstract Metal-insulator-metal capacitors were used for determining the DC and frequency-dependent characteristics of ultra-thin Al2O3 (Thox = 22 nm). For this purpose, a state-of-the-art insulating layer was formed using atomic deposition, which enables enhanced performance of devices and… read more here.
Keywords: simple test; test vehicles; frequency; mim capacitors ... See more keywords