A capillary manometer for pressure measurements in small cavities
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DOI: 10.1016/j.vacuum.2016.12.019
Abstract: Abstract Measuring pressures inside small cavities is a demanding task, but an essential one for applications in microfluidics. Although several MEMS-based pressure sensors have already been demonstrated, their fabrication is complicated and they usually require… read more here.
Keywords: capillary manometer; small cavities; manometer pressure; pressure measurements ... See more keywords