Unlocking the Carbyne-Enriched Nanocoating Sensitivity to Volatile Organic Vapors with Plasma-Driven Deposition onto Bulk Micromachined Silicon Membranes
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DOI: 10.3390/nano12122066
Abstract: Due to the unique combination of physicochemical and structural properties of carbyne-enriched nanocoatings, they can be used for the development of high-end electronic devices. We propose using it for the development of sensor platforms based… read more here.
Keywords: bulk micromachined; deposition; enriched nanocoating; volatile organic ... See more keywords