Interaction effects of cathode power, bias voltage, and mid-frequency on the structural and mechanical properties of sputtered amorphous carbon films
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DOI: 10.1016/j.apsusc.2019.05.131
Abstract: Abstract The Design of Experiments is a promising method to investigate the cause-effect relation between the mid-frequency magnetron sputtering parameters on the structural and mechanical properties of amorphous carbon (a-C) films. Based on the Central… read more here.
Keywords: spectroscopy; cathode power; bias voltage; power bias ... See more keywords