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Published in 2019 at "Journal of Materials Chemistry C"
DOI: 10.1039/c9tc01164a
Abstract: Cationic compositional effects of amorphous In–Ga–Zn–O (a-IGZO) prepared by atomic layer deposition (ALD) were strategically investigated for thin film transistor applications.
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Keywords:
prepared atomic;
cationic compositional;
thin film;
atomic layer ... See more keywords