Collapse voltage analysis of central annular ring metallized membrane based MEMS micromachined ultrasonic transducer
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DOI: 10.1007/s00542-019-04613-x
Abstract: In this paper we have explored central annular ring metallized capacitive micromachined ultrasonic transducer (CMUT) structure. The metallization is done partially and it is patterned in such a way that it forms a flat ring… read more here.
Keywords: collapse voltage; membrane; central annular; annular ring ... See more keywords