Nonvolatile Silicon Photonic MEMS Switch Based on Centrally-Clamped Stepped Bistable Mechanical Beams
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DOI: 10.1364/prj.533773
Abstract: High-performance photonic switches are essential for large-scale optical routing for AI large models and Internet of things. Realizing nonvolatility can further reduce power consumption and expand application scenarios. We propose a nonvolatile 2*2 silicon photonic… read more here.
Keywords: mems switch; silicon photonic; centrally clamped; clamped stepped ... See more keywords