Ceramics for Microelectromechanical Systems Applications: A Review
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DOI: 10.3390/mi15101244
Abstract: A comprehensive review of the application of different ceramics for MEMS devices is presented. Main ceramics materials used for MEMS systems and devices including alumina, zirconia, aluminum Nitride, Silicon Nitride, and LTCC are introduced. Conventional… read more here.
Keywords: mems devices; systems applications; ceramics microelectromechanical; applications review ... See more keywords