Discharge characteristics of electronegative Mg–CF4 direct current magnetron sputtering by probe measurements
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DOI: 10.1063/5.0052871
Abstract: The discharge characteristics of Mg–CF4 direct current (DC) reactive magnetron sputtering, which is assumed to be a typical electronegative discharge, are investigated as a function of CF4/(Ar + CF4) discharge gas ratios using probe measurements. For comparison,… read more here.
Keywords: cf4 cf4; magnetron sputtering; cf4; probe ... See more keywords