Articles with "cf4 plasma" as a keyword



CF4 Plasma‐Generated LiF‐Li2C2 Artificial Layers for Dendrite‐Free Lithium‐Metal Anodes

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Published in 2022 at "Advanced Science"

DOI: 10.1002/advs.202201147

Abstract: Lithium metal anodes have long been considered as “holy grail” in the field of energy storage batteries, but dendrite growth and large volume changes hinder their practical applications. Herein, a facile and eco‐friendly CF4 plasma… read more here.

Keywords: cf4 plasma; li2c2 artificial; metal anodes; lif li2c2 ... See more keywords

The effects of radio-frequency CF4 plasma on adhesion properties of vertically aligned carbon nanotube arrays

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Published in 2019 at "Carbon"

DOI: 10.1016/j.carbon.2018.10.092

Abstract: Abstract In this paper, vertical aligned carbon nanotube arrays (VACNTs) were modified by radio-frequency tetrafluoromethane (CF4) plasma for different times, and the corresponding adhesion performance of VACNTs was investigated. Scanning electron microscopy and Raman spectroscopy… read more here.

Keywords: spectroscopy; adhesion; cf4 plasma; aligned carbon ... See more keywords

Controllable CF4 Plasma In Situ Modification Strategy Enables Durable Zinc Metal Anode.

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Published in 2023 at "ACS applied materials & interfaces"

DOI: 10.1021/acsami.2c19863

Abstract: Zn metal with high specific capacity and low redox potential is deemed to be an ideal anode material for aqueous zinc-ion batteries (ZIBs). However, the serious dendrite problems induced by the uneven deposition of zinc… read more here.

Keywords: cf4 plasma; situ modification; zinc; anode ... See more keywords
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Phase evolution of ultra-thin Ni silicide films on CF4 plasma immersion ion implanted Si.

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Published in 2020 at "Nanotechnology"

DOI: 10.1088/1361-6528/ab6d21

Abstract: We present a systematic study on the effects of CF4 plasma immersion ion implantation (PIII) in Si on the phase evolution of ultra-thin Ni silicides. For 3 nm Ni, NiSi2 was formed on Si substrates… read more here.

Keywords: evolution; immersion ion; phase evolution; plasma immersion ... See more keywords

Low-damage etching of poly-Si and SiO2 via a low-energy electron beam in inductively coupled CF4 plasma

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Published in 2024 at "Plasma Sources Science and Technology"

DOI: 10.1088/1361-6595/ad8217

Abstract: Electron-assisted etching of poly-Si and SiO2 is performed via a grid system in inductively coupled CF4 plasma. The feasibility of electron-assisted etching is discussed with a focus on the low-surface damage of the etching. The… read more here.

Keywords: electron beam; etching poly; poly sio2; electron ... See more keywords

Fluorination of vertically aligned carbon nanotubes: from CF4 plasma chemistry to surface functionalization

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Published in 2017 at "Beilstein Journal of Nanotechnology"

DOI: 10.3762/bjnano.8.173

Abstract: The surface chemistry of plasma fluorinated vertically aligned carbon nanotubes (vCNT) is correlated to the CF4 plasma chemical composition. The results obtained via FTIR and mass spectrometry are combined with the XPS and Raman analysis… read more here.

Keywords: surface; chemistry; carbon nanotubes; vertically aligned ... See more keywords