Theoretical Investigation on H-Abstraction Reactions of Silanes with H and CH3 Attacking: A Comparative Study with Alkane Counterparts
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DOI: 10.1021/acsomega.1c07031
Abstract: Silicon-based organic precursors are widely applied in the vapor-fed flame synthesis of monocrystalline silicon, silicon dioxide, and silicon nitride. Due to the lack of kinetic investigations on reactions of silicon-based organic precursors, rate constants were… read more here.
Keywords: silicon; ch3 attacking; abstraction reactions; alkane counterparts ... See more keywords