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Published in 2019 at "Solid-State Electronics"
DOI: 10.1016/j.sse.2019.03.011
Abstract: Abstract Future Nanoelectronic devices faces substantial challenges, in particular increased power consumption, saturation of performance, large variability and reliability limitation. In this respect, novel materials and innovative device architectures will be needed for Nanoscale FETs.…
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Keywords:
power;
challenges high;
high performance;
end roadmap ... See more keywords
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Published in 2018 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927618004555
Abstract: A FIB-SEM offers access to elemental and structural site-specific information at the nano-scale by the means of FIB-SEM tomography. However, as valuable as the obtainable data is, as much care has to be taken during…
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Keywords:
sem;
sem tomography;
challenges high;
fib sem ... See more keywords