Application of electron channeling contrast imaging to 3D semiconductor structures through proper detector configurations.
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DOI: 10.1016/j.ultramic.2019.112928
Abstract: Nowadays electron channeling contrast imaging (ECCI) is widely used to characterize crystalline defects on blanket semiconductors. Its further application in the semiconductor industry is however challenged by the emerging rise of nanoscale 3D heterostructures. In… read more here.
Keywords: contrast imaging; contrast; semiconductor; channeling contrast ... See more keywords