Electrical and Optical Characterization of Acetylene RF CCP for Synthesis of Different Forms of Hydrogenated Amorphous Carbon Films
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DOI: 10.1007/s11090-019-10031-8
Abstract: We present an electrical and spectroscopic characterization of Acetylene plasma used for deposition of different forms of hydrogenated amorphous carbon (a-C:H) films at different discharge powers. Asymmetric radio frequency capacitively coupled plasma source driven by… read more here.
Keywords: characterization acetylene; forms hydrogenated; hydrogenated amorphous; spectroscopy ... See more keywords