Characterization of a PiezoMUMPs Microsensor for Contactless Measurements of DC Electrical Current
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DOI: 10.1109/tim.2019.2908510
Abstract: This paper presents an integrated sensor able to perform contactless measurements of dc electrical current. The microsensor conceived is based on the PiezoMUMPs technology which embeds a layer of piezoelectric material thus offering a mechanoelectric… read more here.
Keywords: microsensor; contactless measurements; characterization piezomumps; measurements electrical ... See more keywords