Characterization of PillarHall test chip structures using reflectometry technique
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DOI: 10.1088/1361-6501/acda54
Abstract: Thin film samples where one of the thin layers consists of vacuum or air are called PillarHalls due to their support structure in silicon wafers. Custom PillarHall samples were provided by manufacturer and characterized by… read more here.
Keywords: test chip; characterization pillarhall; pillarhall test; reflectometry ... See more keywords