Infrared-laser based characterization of the pyroelectricity in AlScN thin-films
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DOI: 10.1016/j.tsf.2019.137623
Abstract: Abstract A measurement system for characterization of the pyroelectricity in thin- and thick-films is introduced. The system is based on a quantum-cascade infrared laser that stimulates the temperature within the sample film with variable modulation… read more here.
Keywords: infrared laser; characterization pyroelectricity; films infrared;