Fabrication and characterization of Si1−xGex nanocrystals in as-grown and annealed structures: a comparative study
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DOI: 10.3762/bjnano.10.182
Abstract: Multilayer structures comprising of SiO2/SiGe/SiO2 and containing SiGe nanoparticles were obtained by depositing SiO2 layers using reactive direct current magnetron sputtering (dcMS), whereas, Si and Ge were co-sputtered using dcMS and high-power impulse magnetron sputtering… read more here.
Keywords: characterization si1; grown annealed; fabrication characterization; si1 xgex ... See more keywords