Characterizing the stress and electrical properties of superconducting molybdenum films
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DOI: 10.1088/1361-6668/ac4173
Abstract: In the process of minimizing stress in sputtered molybdenum (Mo) films for fabricating transition-edge sensor devices, we have investigated correlations between the stress and film deposition parameters. At a fixed sputtering power, the tensile stress… read more here.
Keywords: molybdenum films; characterizing stress; film; electrical properties ... See more keywords