Comparison of Plasma Effect on Dewetting Kinetics of Sn Films Between Grounded and Floating Substrates
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DOI: 10.1007/s13391-019-00190-3
Abstract: Abstract When metal thin films deposited typically by sputtering is heated to sufficiently high temperature, thin films tend to disintegrate into individual isolated spherical particles, whose phenomenon is called thermal dewetting. If such metal films… read more here.
Keywords: plasma; enhanced dewetting; charge buildup; dewetting kinetics ... See more keywords