Sensitivity analysis of the electrostatic interaction between the atomic force microscopy probe and a thin dielectric film with 3D-localized charge cloud
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DOI: 10.1063/1.5060655
Abstract: Recent experimental studies have demonstrated that the Electrostatic Force Distance Curve (EFDC) can be used for space charge probing in thin dielectric layers. Experiments highlight that this method seems to be sensitive to charge localization.… read more here.
Keywords: microscopy; charge; atomic force; charge cloud ... See more keywords