Analysis of Electrostatic MEMS Using Energy-Charge Landscape
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DOI: 10.1109/ted.2020.3018700
Abstract: A common way to analyze electrostatic microelectromechanical systems (MEMS) actuators is to use their energy-displacement landscape. Here, we describe an alternative approach to analyze electrostatic MEMS actuators using their energy-charge landscape. This technique involves coordinate… read more here.
Keywords: landscape; energy charge; electrostatic mems; energy ... See more keywords