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Published in 2017 at "Nanotechnology"
DOI: 10.1088/1361-6528/aa57aa
Abstract: During the last three decades, the remarkable dynamic features of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), and advances in solid-state electronics hold much potential for the fabrication of extremely sensitive charge sensors. These sensors…
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Keywords:
sensing single;
single electrons;
charge;
micro nano ... See more keywords