Electron-beam charging of dielectrics preirradiated with moderate-energy ions and electrons
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DOI: 10.1134/s1063783417080212
Abstract: The effects of charging of dielectric targets irradiated with moderate-energy electrons in a scanning electron microscope are examined. Considerable differences in the kinetics of charging of the reference samples and the samples preirradiated with ions… read more here.
Keywords: beam charging; electron beam; charging dielectrics; ions electrons ... See more keywords