Structuring of Si into Multiple Scales by Metal-Assisted Chemical Etching.
Sign Up to like & getrecommendations! Published in 2021 at "Advanced materials"
DOI: 10.1002/adma.202005932
Abstract: Structuring Si, ranging from nanoscale to macroscale feature dimensions, is essential for many applications. Metal-assisted chemical etching (MaCE) has been developed as a simple, low-cost, and scalable method to produce structures across widely different dimensions.… read more here.
Keywords: metal assisted; mace; structuring multiple; chemical etching ... See more keywords
Wafer-Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle-Assisted Chemical Etching and Pseudomorphic Thermal Oxidation.
Sign Up to like & getrecommendations! Published in 2022 at "Small"
DOI: 10.1002/smll.202206842
Abstract: Many biological materials exhibit a multiscale porosity with small, mostly nanoscale pores as well as large, macroscopic capillaries to simultaneously achieve optimized mass transport capabilities and lightweight structures with large inner surfaces. Realizing such a… read more here.
Keywords: assisted chemical; oxidation; hierarchically porous; porous silicon ... See more keywords
A study on controllable aluminium doped zinc oxide patterning by chemical etching for MEMS application
Sign Up to like & getrecommendations! Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-015-2783-1
Abstract: This present work reports on the study of controllable aluminium doped zinc oxide (AZO) patterning by chemical etching for MEMS application. The AZO thin film was prepared by RF magnetron sputtering as it is capable… read more here.
Keywords: microscopy; thin film; azo thin; etch ... See more keywords
Wet-Chemical Etching: a Novel Nanofabrication Route to Prepare Broadband Random Plasmonic Metasurfaces
Sign Up to like & getrecommendations! Published in 2019 at "Plasmonics"
DOI: 10.1007/s11468-018-0813-4
Abstract: Broadband optical metasurfaces are gaining enormous attention owing to their potential applications in optoelectronic devices, sensors, and flat optics. Here, we demonstrate for the first time a single-step, novel wet-chemical etching-based nanofabrication method to produce… read more here.
Keywords: broadband; random plasmonic; nanofabrication; wet chemical ... See more keywords
Ultra-Thin Silicon Wafers Fabrication and Inverted Pyramid Texturing Based on Cu-Catalyzed Chemical Etching
Sign Up to like & getrecommendations! Published in 2020 at "Silicon"
DOI: 10.1007/s12633-020-00429-x
Abstract: The ultra-thin silicon solar devices perform a potential development direction to decrease material usage and thus lowering the expense. The ultra-thin silicon wafer and inverted pyramid structure texturing were completed by one-step Cu-catalyzed chemical etching… read more here.
Keywords: inverted pyramid; thin silicon; ultra thin; catalyzed chemical ... See more keywords
Morphology control of nanostructure using microsphere-assisted femtosecond laser double-pulse ablation and chemical etching
Sign Up to like & getrecommendations! Published in 2020 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.144272
Abstract: Abstract In this study, a microsphere-assisted femtosecond (fs) laser temporal shaping fabrication method was proposed. Different from two-dimensional (2D) micro/nanohole pattern, three-dimensional (3D) hexagonal ring-like array can be obtained by microsphere-assisted fs laser double-pulse temporal… read more here.
Keywords: assisted femtosecond; femtosecond laser; laser double; microsphere assisted ... See more keywords
Plasma-induced chemical etching generating Ni3S2 for formaldehyde detection
Sign Up to like & getrecommendations! Published in 2021 at "Chinese Chemical Letters"
DOI: 10.1016/j.cclet.2021.09.024
Abstract: ABSTRACT In this paper, Ni3S2 nanosheet (NS) was generated by chemical etching with sodium sulfide directly on the nickel foam (NF), which was induced by dielectric barrier discharge plasma in liquid. Compared with other chemical… read more here.
Keywords: detection; plasma induced; induced chemical; generating ni3s2 ... See more keywords
Effects of chemical etching on structure and properties of Y0.5Gd0.5Ba2Cu3O7-z coated conductors
Sign Up to like & getrecommendations! Published in 2018 at "Ceramics International"
DOI: 10.1016/j.ceramint.2018.05.221
Abstract: Abstract Corrosion resistance is a crucial property to achieve successful superconducting joints of Y0.5Gd0.5Ba2Cu3O7-z (YGdBCO) coated conductors (CCs). Cu and Ag metallic layers need to be fully removed from the area of conductor to be… read more here.
Keywords: etching structure; effects chemical; chemical etching; coated conductors ... See more keywords
The influence of chemical etching on porous structure and mechanical properties of the Ti6AL4V Functionally Graded Porous Scaffolds fabricated by EBM
Sign Up to like & getrecommendations! Published in 2022 at "Materials Chemistry and Physics"
DOI: 10.1016/j.matchemphys.2021.125217
Abstract: Abstract Functionally Graded Porous Scaffolds (FGPS) manufactured from Ti and Ti alloys such as Ti6Al4V is an attractive candidate for mimicking host bone tissue. Porous specimens manufactured by powder-bed fusion additive manufacturing (PBF-AM) methods always… read more here.
Keywords: functionally graded; graded porous; powder; porous scaffolds ... See more keywords
Effect of isopropanol on gold assisted chemical etching of silicon microstructures
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.02.008
Abstract: Abstract Wet etching is an essential and complex step in semiconductor device processing. Metal-Assisted Chemical Etching (MacEtch) is fundamentally a wet but anisotropic etching method. In the MacEtch technique, there are still a number of… read more here.
Keywords: isopropanol gold; gold assisted; effect isopropanol; chemical etching ... See more keywords
Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching
Sign Up to like & getrecommendations! Published in 2021 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2021.105746
Abstract: Abstract Ordered Si nanopillar arrays have a great potential for e.g. photonic, sensing and electronic devices. In the present article, we investigate the tailoring of Si nanostructure geometries obtained on large areas by nanosphere lithography… read more here.
Keywords: metal; metal assisted; assisted chemical; nanosphere lithography ... See more keywords