Study of plasma etching impact on chemoepitaxy directed self-assembly
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DOI: 10.1116/6.0000850
Abstract: Directed self-assembly (DSA) of block copolymers is one of the most promising solutions investigated to obtain small and dense patterns for the sub-10 nm nodes. One of the most important aspects of the DSA technology is… read more here.
Keywords: directed self; study plasma; self assembly; chemoepitaxy ... See more keywords