Top-down and sensitive indium oxide nanoribbon field effect transistor biosensor chips integrated with on-chip gate electrodes toward point of care applications.
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DOI: 10.1088/1361-6528/aad435
Abstract: We report a scalable, uniform, and sensitive top-down fabricated indium oxide (In2O3) nanoribbon biosensor platform with integrated on-chip gate electrodes using two photolithographic masks. The purpose of this on-chip gate electrode is to control the… read more here.
Keywords: indium oxide; biosensor; gate electrodes; chip gate ... See more keywords